The XYRIS 4000 CL (Confocal Laser) is a compact state of the art surface profiling system that is capable of measuring form and thickness of various surfaces. It incorporates a CCD camera for on screen viewing of the surface under investigation, helping to identify areas or features of interest quickly and easily. The WL (White Light) sensor offers increased performance for spherical or aspherical surface measurement.

Sensor Specifications

XYris 4000CL - 25mm XYZ motion system - CL sensor has integrated microscope video camera to assist in targeting system
Silicon MEMS device measurement using the XYRIS 4000CL (area 60um x 60um). The trenches are approximately 3um wide and 8um deep.