Sensor Types

XYris Systems Series are all supplied with high precision sensors. 


A very small (2 micron) spot size and 10nm resolution makes this sensor ideal for measuring the smallest of features (sub micron level). It is also capable of measuring the thickness of transparent layers and has an integral video microscope for targeting and operator feedback during setup and operation.

The Targeting Video Microscope view (CL Systems only) 1.3 x 1.1mm.
Schematic of the confocal operation principal Collimator lens is oscillated over the sensors gauge range with the highest received intensity reflection corresponds to the surface height.


Ideally suited to more course applications where there is a large variance between the highest and lowest points on the surface or there are very steep features to be measured. This sensor has large gauge ranges (up to 2mm) and the twin detector configuration greatly improves receiving performances and reduces shadowing effects on heavily crenulated surfaces.

Schematic of Laser Triangulation system where the reflected light is monitored at two receiving elements to minimise shadowing caused by large steps in the surface profile blocking the return path of the reflected light.

CONFOCAL WHITE LIGHT (WL) Sensor - Chromatic Sensor

This sensor offers small spot sizes* and high frequency** sample rates. Its’ high performance on spherical or aspherical surfaces make it idealy suited to applications where high accuracy measurement of curved surfaces is required.


* 7 mm standard and 2mm optional   ** 1kHz standard up to 30 kHz optional

Schematic outline of the measurement principle for the white light sensor. The chromatic aberration of the lens causes a variance of the focal length depending on wavelength. The wavelength peak detected by the spectrometer determines surface displacement.